Tantalum(III) nitride
Encyclopedia
Tantalum nitride is an inorganic chemical compound
. It is sometimes used to create barrier or "glue" layers between copper
, or other conductive metals, and dielectric insulator films such as thermal oxides. These films are deposited on top of silicon
wafers during the manufacture of integrated circuit
s, to create thin film
surface mount
resistor
s and has other electronic applications.
Chemical compound
A chemical compound is a pure chemical substance consisting of two or more different chemical elements that can be separated into simpler substances by chemical reactions. Chemical compounds have a unique and defined chemical structure; they consist of a fixed ratio of atoms that are held together...
. It is sometimes used to create barrier or "glue" layers between copper
Copper
Copper is a chemical element with the symbol Cu and atomic number 29. It is a ductile metal with very high thermal and electrical conductivity. Pure copper is soft and malleable; an exposed surface has a reddish-orange tarnish...
, or other conductive metals, and dielectric insulator films such as thermal oxides. These films are deposited on top of silicon
Silicon
Silicon is a chemical element with the symbol Si and atomic number 14. A tetravalent metalloid, it is less reactive than its chemical analog carbon, the nonmetal directly above it in the periodic table, but more reactive than germanium, the metalloid directly below it in the table...
wafers during the manufacture of integrated circuit
Integrated circuit
An integrated circuit or monolithic integrated circuit is an electronic circuit manufactured by the patterned diffusion of trace elements into the surface of a thin substrate of semiconductor material...
s, to create thin film
Thin film
A thin film is a layer of material ranging from fractions of a nanometer to several micrometers in thickness. Electronic semiconductor devices and optical coatings are the main applications benefiting from thin film construction....
surface mount
Surface-mount technology
Surface mount technology is a method for constructing electronic circuits in which the components are mounted directly onto the surface of printed circuit boards . An electronic device so made is called a surface mount device...
resistor
Resistor
A linear resistor is a linear, passive two-terminal electrical component that implements electrical resistance as a circuit element.The current through a resistor is in direct proportion to the voltage across the resistor's terminals. Thus, the ratio of the voltage applied across a resistor's...
s and has other electronic applications.