Process control monitoring
Encyclopedia
In the application of integrated circuits, process control monitoring (PCM) is the procedure followed to obtain detailed information about the process used.
PCM is associated with designing and fabricating special structures that can monitor technology specific parameters such as Vth in CMOS
and Vbe in Bipolars. These structures are placed across the wafer at specific locations along with the chip produced so that a closer look into the process variation is possible.
PCM is associated with designing and fabricating special structures that can monitor technology specific parameters such as Vth in CMOS
CMOS
Complementary metal–oxide–semiconductor is a technology for constructing integrated circuits. CMOS technology is used in microprocessors, microcontrollers, static RAM, and other digital logic circuits...
and Vbe in Bipolars. These structures are placed across the wafer at specific locations along with the chip produced so that a closer look into the process variation is possible.