Paul McIntyre
Encyclopedia
Paul C. McIntyre is an Associate Professor in the Department of Materials Science and Engineering at Stanford University
. He is well known for his research in atomic layer deposition
for high-k dielectric
s, semiconductor/oxide interfaces, and thin film applications. He received his Sc.D.
from MIT in 1993. He has won the IBM Faculty Award and was a Charles Lee Powell Foundation Scholar.
Stanford University
The Leland Stanford Junior University, commonly referred to as Stanford University or Stanford, is a private research university on an campus located near Palo Alto, California. It is situated in the northwestern Santa Clara Valley on the San Francisco Peninsula, approximately northwest of San...
. He is well known for his research in atomic layer deposition
Atomic layer deposition
Atomic layer deposition is a thin film deposition technique that is based on the sequential use of a gas phase chemical process. The majority of ALD reactions use two chemicals, typically called precursors. These precursors react with a surface one-at-a-time in a sequential manner...
for high-k dielectric
High-k Dielectric
The term high-κ dielectric refers to a material with a high dielectric constant κ used in semiconductor manufacturing processes which replaces the silicon dioxide gate dielectric...
s, semiconductor/oxide interfaces, and thin film applications. He received his Sc.D.
Doctor of Science
Doctor of Science , usually abbreviated Sc.D., D.Sc., S.D. or Dr.Sc., is an academic research degree awarded in a number of countries throughout the world. In some countries Doctor of Science is the name used for the standard doctorate in the sciences, elsewhere the Sc.D...
from MIT in 1993. He has won the IBM Faculty Award and was a Charles Lee Powell Foundation Scholar.