Titanium(IV) silicide
Encyclopedia
Titanium disilicide is an inorganic chemical compound
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Titanium silicide is used in semiconductor industry. It's typically grown by means of salicide
technology over silicon and polysilicon lines to reduce the sheet resistance of local transistors connections.
In microelectronic industry is typically used in the C54 phase.
Chemical compound
A chemical compound is a pure chemical substance consisting of two or more different chemical elements that can be separated into simpler substances by chemical reactions. Chemical compounds have a unique and defined chemical structure; they consist of a fixed ratio of atoms that are held together...
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Titanium silicide is used in semiconductor industry. It's typically grown by means of salicide
Salicide
The term salicide refers to a technology used in the microelectronics industry used to form electrical contacts between the semiconductor device and the supporting interconnect structure...
technology over silicon and polysilicon lines to reduce the sheet resistance of local transistors connections.
In microelectronic industry is typically used in the C54 phase.