Mask set
Encyclopedia
A mask set is a series of electronic data that define geometry for the photolithography
steps of semiconductor fabrication. Each of the physical masks generated from this data is called a photomask
.
A mask set for a modern process typically contains as many as twenty or more masks, each of which defines a specific photolithographic step in the semiconductor fabrication process. Examples of masks include:
For more information, see photolithography
and semiconductor manufacturing.
Photolithography
Photolithography is a process used in microfabrication to selectively remove parts of a thin film or the bulk of a substrate. It uses light to transfer a geometric pattern from a photomask to a light-sensitive chemical "photoresist", or simply "resist," on the substrate...
steps of semiconductor fabrication. Each of the physical masks generated from this data is called a photomask
Photomask
A photomask is an opaque plate with holes or transparencies that allow light to shine through in a defined pattern. They are commonly used in photolithography.-Overview:...
.
A mask set for a modern process typically contains as many as twenty or more masks, each of which defines a specific photolithographic step in the semiconductor fabrication process. Examples of masks include:
- p-well
- n-well
- active
- poly
- p-select
- n-select
- contact
- metal1, 2, 3...
For more information, see photolithography
Photolithography
Photolithography is a process used in microfabrication to selectively remove parts of a thin film or the bulk of a substrate. It uses light to transfer a geometric pattern from a photomask to a light-sensitive chemical "photoresist", or simply "resist," on the substrate...
and semiconductor manufacturing.