Lam Research
Encyclopedia
Lam Research Corporation engages in the design, manufacture, marketing, and service of semiconductor
processing equipment used in the fabrication of integrated circuits. Its products include etch systems, including dielectric etch products, conductor etch products, and resist strip products, as well as synergy cleaning products. The company markets its products and services primarily to companies involved in the production of semiconductors in the United States, Europe, Asia Pacific, Korea, and Japan. Lam Research Corporation was founded in 1980 by Dr. David K. Lam and is headquartered in Fremont, California.
2003 Demonstrated extendibility to sub-65 nm scales for critical front- and backend processes on 2300 Exelan Flex dielectric etch system
Achieved ISO 14001 environmental management system registration
2002 Launched 2300 Versys Star silicon etch system for sub-90 nm applications
Released MyLam.com, a new extranet web site for customers that provides immediate access to the latest technical information and documentation online
2001 Introduced the TCP 9600DFM metal etch system for sub-150 nm processes
Shipped 1,000th post-CMP clean system to Philips
Achieved ISO 9001:2000 Quality System registration; scope includes design, manufacture, installation, and servicing of semiconductor wafer fabrication process equipment
2000 Shipped 2,000th high-density TCP etch chamber
Launched 2300 Etch Series, offering 200mm and 300mm capability
1999 Shipped 100th Synergy Integra integrated CMP cleaning system
Introduced next-generation Exelan dielectric etch system employing Dual Frequency Confined (DFC) plasma source technology
1998 Appointed Jim Bagley chairman of the board
Introduced first CMP system employing proprietary Linear Planarization Technology design
Appointed Steve Newberry executive vice president and chief operating officer
1997 Appointed Jim Bagley chief executive officer
Acquired OnTrak Systems, Inc.
1996 Shipped 500th TCP Etch Series chamber
Introduced improved DFC technology, 4520XLE dielectric etch system
1995 Introduced first product incorporating DFC technology, 4520XL dielectric etch system
Achieved 0.25 micrometre process capabilities in all served markets
1994 Opened R&D center at Fremont, Calif. campus
Shipped 1,000th Rainbow Series System
1993 Opened process development center in Japan
Introduced Alliance cluster tool platform
1992 Introduced first Transformer Coupled Plasma source technology based products, the TCP 9400 for silicon etch and the TCP 9600 for metal etch
1990 Established presence in China
1987 Relocated to new headquarters on Cushing Parkway in Fremont
Introduced Rainbow 4400 Etch Series (successor to AutoEtch) for polysilicon etch
1985 Established a global presence: Asia and Europe
Introduced first oxide etch system, the AutoEtch 590
1984 Achieved IPO and listing on Nasdaq
1981 Introduced first product, the AutoEtch 480, for polysilicon etch
1980 Founded by David K. Lam
Semiconductor
A semiconductor is a material with electrical conductivity due to electron flow intermediate in magnitude between that of a conductor and an insulator. This means a conductivity roughly in the range of 103 to 10−8 siemens per centimeter...
processing equipment used in the fabrication of integrated circuits. Its products include etch systems, including dielectric etch products, conductor etch products, and resist strip products, as well as synergy cleaning products. The company markets its products and services primarily to companies involved in the production of semiconductors in the United States, Europe, Asia Pacific, Korea, and Japan. Lam Research Corporation was founded in 1980 by Dr. David K. Lam and is headquartered in Fremont, California.
History
2004 Launched 2300 Versys Kiyo silicon etch system extending advanced tuning capabilities for 65 nm2003 Demonstrated extendibility to sub-65 nm scales for critical front- and backend processes on 2300 Exelan Flex dielectric etch system
Achieved ISO 14001 environmental management system registration
2002 Launched 2300 Versys Star silicon etch system for sub-90 nm applications
Released MyLam.com, a new extranet web site for customers that provides immediate access to the latest technical information and documentation online
2001 Introduced the TCP 9600DFM metal etch system for sub-150 nm processes
Shipped 1,000th post-CMP clean system to Philips
Achieved ISO 9001:2000 Quality System registration; scope includes design, manufacture, installation, and servicing of semiconductor wafer fabrication process equipment
2000 Shipped 2,000th high-density TCP etch chamber
Launched 2300 Etch Series, offering 200mm and 300mm capability
1999 Shipped 100th Synergy Integra integrated CMP cleaning system
Introduced next-generation Exelan dielectric etch system employing Dual Frequency Confined (DFC) plasma source technology
1998 Appointed Jim Bagley chairman of the board
Introduced first CMP system employing proprietary Linear Planarization Technology design
Appointed Steve Newberry executive vice president and chief operating officer
1997 Appointed Jim Bagley chief executive officer
Acquired OnTrak Systems, Inc.
1996 Shipped 500th TCP Etch Series chamber
Introduced improved DFC technology, 4520XLE dielectric etch system
1995 Introduced first product incorporating DFC technology, 4520XL dielectric etch system
Achieved 0.25 micrometre process capabilities in all served markets
1994 Opened R&D center at Fremont, Calif. campus
Shipped 1,000th Rainbow Series System
1993 Opened process development center in Japan
Introduced Alliance cluster tool platform
1992 Introduced first Transformer Coupled Plasma source technology based products, the TCP 9400 for silicon etch and the TCP 9600 for metal etch
1990 Established presence in China
1987 Relocated to new headquarters on Cushing Parkway in Fremont
Introduced Rainbow 4400 Etch Series (successor to AutoEtch) for polysilicon etch
1985 Established a global presence: Asia and Europe
Introduced first oxide etch system, the AutoEtch 590
1984 Achieved IPO and listing on Nasdaq
1981 Introduced first product, the AutoEtch 480, for polysilicon etch
1980 Founded by David K. Lam