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Chlorosilane

 

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Chlorosilane



 
 
Chlorosilanes are a group of reactive, chlorine
Chlorine

Chlorine...
-containing chemical compound
Chemical compound

A chemical compound is a Chemical substance consisting of two or more different chemical element Chemical bond together in a fixed mass ratio that can be split into simpler substances....
s, related to silane
Silane

Silane is a chemical compound with chemical formula siliconhydrogen4. It is the silicon Analog of methane. At room temperature, silane is a gas, and is pyrophoric ? it undergoes spontaneous combustion in air, without the need for external ignition....
 and used in many chemical processes. Each such chemical has at least one silicon
Silicon

Silicon is the most common metalloid. It is a chemical element, which has the symbol Si and atomic number 14. The atomic mass is 28.0855....
-chlorine bond.

are prepared by the Müller Rochow process, which involves treating silicon with hydrogen chloride
Hydrogen chloride

The Chemical compound hydrogen chloride has the chemical formula HydrogenChlorine. At room temperature, it is a colorless gas, which forms white fumes of hydrochloric acid upon contact with atmospheric humidity....
 at elevated temperatures in the presence of a copper
Copper

Copper is a chemical element with the symbol Cu and atomic number 29.It is a ductile metal with very high thermal and electrical conductivity....
 catalyst. The idealized equation is
2 Si +6 HCl → 2HSiCl3 + 2 H2,
Trichlorosilane (HSiCl3) is the main product; dichlorosilane
Dichlorosilane

Dichlorosilane , or DCS as it is commonly known, is usually mixed with ammonia in LPCVD chambers to grow silicon nitride in semiconductor processing....
 (H2SiCl2) and silicon tetrachloride (SiCl4) are obtained as byproducts.






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Encyclopedia


Chlorosilanes are a group of reactive, chlorine
Chlorine

Chlorine...
-containing chemical compound
Chemical compound

A chemical compound is a Chemical substance consisting of two or more different chemical element Chemical bond together in a fixed mass ratio that can be split into simpler substances....
s, related to silane
Silane

Silane is a chemical compound with chemical formula siliconhydrogen4. It is the silicon Analog of methane. At room temperature, silane is a gas, and is pyrophoric ? it undergoes spontaneous combustion in air, without the need for external ignition....
 and used in many chemical processes. Each such chemical has at least one silicon
Silicon

Silicon is the most common metalloid. It is a chemical element, which has the symbol Si and atomic number 14. The atomic mass is 28.0855....
-chlorine bond.

Synthesis

They are prepared by the Müller Rochow process, which involves treating silicon with hydrogen chloride
Hydrogen chloride

The Chemical compound hydrogen chloride has the chemical formula HydrogenChlorine. At room temperature, it is a colorless gas, which forms white fumes of hydrochloric acid upon contact with atmospheric humidity....
 at elevated temperatures in the presence of a copper
Copper

Copper is a chemical element with the symbol Cu and atomic number 29.It is a ductile metal with very high thermal and electrical conductivity....
 catalyst. The idealized equation is
2 Si +6 HCl → 2HSiCl3 + 2 H2,
Trichlorosilane (HSiCl3) is the main product; dichlorosilane
Dichlorosilane

Dichlorosilane , or DCS as it is commonly known, is usually mixed with ammonia in LPCVD chambers to grow silicon nitride in semiconductor processing....
 (H2SiCl2) and silicon tetrachloride (SiCl4) are obtained as byproducts. The process was independently discovered by Eugene G. Rochow and Richard Müller in 1940.

Chemistry

All chlorosilanes react with water
Water

Water is a common chemical substance that is essential for the survival of all known forms of life. In typical usage, water refers only to its liquid form or States of matter, but the substance also has a solid state, ice, and a gaseous state, water vapor or steam....
 to produce hydrogen chloride
Hydrogen chloride

The Chemical compound hydrogen chloride has the chemical formula HydrogenChlorine. At room temperature, it is a colorless gas, which forms white fumes of hydrochloric acid upon contact with atmospheric humidity....
. The remaining hydroxyl group bonds to the silicon, initially forming a silol group (analogous to alcohol
Alcohol

In chemistry, an alcohol is any organic compound in which a hydroxyl Functional group is bound to a carbon atom of an alkyl or substituted alkyl group....
). In general, this will eventually bond to a solid oxide
Oxide

An oxide is a chemical compound contaning at least one oxygen atom as well as at least one other element. Most of the Earth's crust consists of oxides....
 surface or react with another chlorosilane or silol molecule. In the latter cases, the oxygen atom forms a link between two silicon atoms, analogous to the ether
Ether

Ether is a class of organic compounds which contain an ether functional group ? an oxygen atom connected to two alkyl or aryl groups ? of general formula R?O?R....
 linkage in organic chemicals, and identical to the bonding in silicon dioxide
Silicon dioxide

The chemical compound 'silicon dioxide', also known as 'silica' , is an oxide of silicon with a chemical formula of and has been known for its hardness since antiquity....
.

Use

Silicon tetrachloride
Silicon tetrachloride

Silicon tetrachloride is a non-polar chemical compound with the chemical formula SiCl4. It was prepared by J?ns Jakob Berzelius in 1823....
 (SiCl4) and trichlorosilane
Trichlorosilane

Trichlorosilane is a chemical compound containing silicon, hydrogen, and chlorine. At high temperatures, it decomposes to produce silicon, and therefore purified trichlorosilane is the principal source of ultrapure silicon in the semiconductor industry....
 (HSiCl3) are intermediates in the production of ultrapure silicon in the semiconductor industry. Chlorosilanes obtained from crude silicon are purified by fractional distillation
Fractional distillation

Fractional distillation is the separation of a mixture into its component parts, or fractions, such as in separating chemical compound by their boiling point by heating them to a temperature at which several fractions of the compound will evaporate....
 techniques and then reduced with hydrogen to give silicon of 99.999999999 % (11 nines) purity.

Organic
Organic compound

An organic compound is any member of a large class of chemical compounds whose molecules contain carbon. For historical reasons discussed below, a few types of compounds such as carbonates, simple oxides of carbon and cyanides, as well as the allotropes of carbon, are considered Inorganic compound....
 chlorosilanes are frequently used as coating
Coating

Coating is a covering that is applied to an object. The aim of applying coatings is to improve surface properties of a bulk material usually referred to as a Substrate ....
s for silicon
Silicon

Silicon is the most common metalloid. It is a chemical element, which has the symbol Si and atomic number 14. The atomic mass is 28.0855....
 and glass
Glass

Glass generally refers to a Hardness, brittle, transparency amorphous solid, such as that used for windows, many Glass Bottles, or eyewear, including, but not limited to, soda-lime glass, borosilicate glass, acrylic glass, sugar glass, Muscovite , or aluminium oxynitride....
 surfaces, and in the production of silicone
Silicone

Silicones are largely inert, man-made compounds with a wide variety of forms and uses. Typically heat-resistant, nonstick, and rubberlike, they are commonly used in cookware, medicine, sealants, adhesives, lubricants, and insulation....
 (polysiloxane) polymers. While phenyl chlorosilanes and many others can be used, methylsiloxanes are produced in the greatest quantities.

Methyl chlorosilanes have one to three methyl group
Methyl group

In chemistry, a methyl group is a hydrophobic alkyl functional group named after methane . It has the chemical formula -3 and is often abbreviated -Me....
s. In the case of dichlorodimethylsilane, two chlorine atoms are available, so that a reaction with excess water produces a linear chain of ether-like linkages between silicon atoms. As in polyethers, these flexible linkages produce a rubbery polymer, polydimethylsiloxane
Polydimethylsiloxane

Polydimethylsiloxane belong to a group of polymeric organosilicon compounds which are commonly refered to as silicones. PDMS is the most widely used silicon-based organic compound polymer, and is particularly known for its unusual rheology properties....
 (PDMS). Trichloromethylsilane can be used to induce branching and cross-link
Cross-link

Cross-links are bonds that link one polymer chain to another. They can be covalent bonds or ionic bonds. "Polymer chains" can refer to synthetic polymers or natural polymers ....
ing in PDMS molecules, while chlorotrimethylsilane serves to end backbone chains, limiting molecular weight.

Other acid-forming species, especially acetate
Acetate

An acetate, or ethanoate, is either a salt or ester of acetic acid.In chemistry, the abbreviation Ac refers to the acetyl group. The anion and the functional group may be written as -OAc and AcO-, or OAc respectively....
, can replace chlorine in silicone synthesis with little difference in the chemistry of the finished polymer. These analogues of chlorosilanes are quite common in the sealants and adhesives marketed to consumers, and as precursors for medical-grade silicone, because of reduced toxicity.