shashank91
Hello
Please let me know the 1)materials used, 2)material parameters 3)fabrication techniques used in MEMS design based on
1) piezo-resistive elements
2) capacitive elements
3) piezo-electric elements
Please let me know the 1)materials used, 2)material parameters 3)fabrication techniques used in MEMS design based on
1) piezo-resistive elements
2) capacitive elements
3) piezo-electric elements
